Applied Materials Endura 5500
Applied Materials Endura 5500 - 图片 2
Applied Materials Endura 5500 - 图片 3
Applied Materials Endura 5500 - 图片 4

Applied Materials Endura 5500

The tool is currently in one Fab of Japan, very good working condition. We can provide system dismantling, shipment and installation with our professional experience and service.

分类：

Download Catalog

描述

Applied Materials Endura 5500 PVD System (6″/8″)

  • Wafer Type: SNNF

  • Chambers:

    • A: Pass-through

    • B: Cooldown

    • 1: Ti NB (missing cryo pump, VAT valve)

    • 2: TiN WB (missing cryo pump)

    • 3: AlCu NB (missing cryo pump)

    • 4: TiN NB (missing cryo pump, VAT valve)

    • D: Pre-Clean II (missing turbo controller, 400K & 13.56M RF generators)

    • E & F: Degas chambers

  • Loadlock:

    • Narrow body, auto rotation

    • 150mm cassette, WWM mapping

    • Variable speed, fast vent

  • Mainframe:

    • Buffer Robot: HP, metal blade

    • XFER Robot: HP+

    • Status tower & remote monitor

    • Missing: transfer chamber cryo pump

  • System Rack (208V):

    • Missing: SBC, VGA, OMS, Seri-plex, DI/O & analog boards

  • RF I Rack (208V):

    • Missing all DC power supplies and RF generators

Product Enquiry

相关产品