描述
ASML PAS 5500-100D Stepper Lithography System
The ASML PAS 5500-100D is a proven and reliable stepper lithography system widely used in 200mm wafer production. It is especially suited for small to medium volume manufacturing and specialty processes such as MEMS, analog ICs, and power devices. Equipped with a deep ultraviolet (DUV) light source, it delivers excellent alignment accuracy and process stability, supporting feature sizes of 0.35 µm and above.
Key Features:
-
High alignment precision and stability for consistent processing results
-
Modular design for easy maintenance and upgradeability
-
Broad compatibility with various process platforms
-
Mature and well-supported platform with extensive field experience
The PAS 5500-100D offers an excellent price-performance ratio and is an ideal solution for fabs looking to expand or diversify their production capabilities.
