Applied Materials Endura 5500 PVD System (6″/8″)

• Wafer Type: SNNF

• Chambers:

  • A: Pass-through

  • B: Cooldown

  • 1: Ti NB (missing cryo pump, VAT valve)

  • 2: TiN WB (missing cryo pump)

  • 3: AlCu NB (missing cryo pump)

  • 4: TiN NB (missing cryo pump, VAT valve)

  • D: Pre-Clean II (missing turbo controller, 400K & 13.56M RF generators)

  • E & F: Degas chambers

• Loadlock:

  • Narrow body, auto rotation

  • 150mm cassette, WWM mapping

  • Variable speed, fast vent

• Mainframe:

  • Buffer Robot: HP, metal blade

  • XFER Robot: HP+

  • Status tower & remote monitor

  • Missing: transfer chamber cryo pump

• System Rack (208V):

  • Missing: SBC, VGA, OMS, Seri-plex, DI/O & analog boards

• RF I Rack (208V):

  • Missing all DC power supplies and RF generators